MINUTE ELECTROMECHANICAL SYSTEM STRUCTURE AND ITS MANUFACTURING METHOD

摘要

PPROBLEM TO BE SOLVED: To provide a minute electromechanical system structure which is made suitable for an optical interference display cell and to provide a manufacturing method of the same. PSOLUTION: Structure of an optical interference display cell includes a first electrode, a second electrode and a post. The second electrode includes a conductor layer covered by a material layer, and is arranged approximately parallel with the first electrode. A support is arranged between the first and second plates to form a gap. In a release etching method used to manufacture the structure, the material layer protects the conductor layer from the damage which may be caused by etching agent. The material layer also protects the conductor layer from the damage which may be caused by oxygen and moisture in the air. PCOPYRIGHT: (C)2005,JPO&NCIPI