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The process of creating a gallium nitride film having a low defect density by vapor phase epitaxy

机译:通过气相外延形成缺陷密度低的氮化镓膜的方法

摘要

The present invention relates to a method of preparing a gallium nitride film having a low defect density by vapor phase epitaxy. The present invention relates to a method for producing a gallium nitride (GaN) layer from the substrate by vapor phase epitaxy deposition of gallium nitride. In the present invention, comprises the steps of vapor-phase epitaxial lateral overgrowth of one at least, prior to at least one of said vapor-phase epitaxial lateral overgrowth step, gallium nitride deposited on the dielectric mask deposited previously , dislocations are generated in the dislocation bending of the maximum number of, curved or by performing the etching of the hole to direct the substrate, to introduce asymmetry in the environment of transition between one of the epitaxial lateral overgrowth step results and characterized in that it does not appear on the surface of the gallium nitride layer formed as. The invention also relates to electronic components and photoelectrons produced from the gallium nitride film.
机译:本发明涉及通过气相外延制备具有低缺陷密度的氮化镓膜的方法。本发明涉及一种通过气相外延淀积氮化镓从衬底制备氮化镓(GaN)层的方法。在本发明中,包括至少一个气相外延横向生长的步骤,在所述气相外延横向过度生长的步骤中的至少一个之前,在先前沉积的电介质掩模上沉积氮化镓,在该沉积中产生位错。最大位错弯曲,弯曲或通过执行蚀刻孔来引导基板,以在外延横向过度生长步骤之一之间的过渡环境中引入不对称,其特征在于它不出现在表面上形成氮化镓层。本发明还涉及由氮化镓膜产生的电子部件和光电子。

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