DEPOSITING METHOD FOR INORGANIC ALIGNMENT LAYER, INORGANIC ALIGNMENT LAYER, SUBSTRATE FOR ELECTRONIC DEVICE, LIQUID CRYSTAL PANEL, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide an inorganic alignment layer having excellent light fastness and capable of generating a pretilt angle, to provide a substrate for an electronic device, a liquid crystal panel and the electronic equipment provided with the inorganic alignment layer and to provide a depositing method for the inorganic alignment layer.;SOLUTION: In the depositing method for the inorganic alignment layer wherein the inorganic alignment layer is deposited on a base material, a target provided opposite to the base material is irradiated with an ion beam to pull out sputtering particles, the base material is irradiated with the sputtering particles from a direction inclined at a prescribed angle θ_s to the vertical direction of the surface of the base material on which the inorganic alignment layer is to be deposited and the inorganic alignment layer wherein columnar crystals constituted principally of an inorganic material are aligned in the state inclined to the surface direction of the surface of the base material on which the inorganic alignment layer is to be deposited is formed on the base material. The shape in the vicinity of the top part of the columnar crystal is controlled by controlling energy and/or the number of the sputtering particles arriving at the base material.;COPYRIGHT: (C)2005,JPO&NCIPI