FRESNEL ZONE PLATE, AND INSTRUMENT AND METHOD FOR MEASURING X-RAY DIFFRACTION

摘要

PROBLEM TO BE SOLVED: To provide an instrument and a method of high precision and high sensitivity for measuring X-ray diffraction having 0.1 μm order of spatial resolution.;SOLUTION: A concentric circular FZP pattern portion 101 is provided on a Ta film on an SiN film by an electron beam drawing technique or the like to form a Fresnel zone plate (FZP) 100. X-ray non-transmission processing by gold plating is executed in the central portion 102 and a peripheral portion of the FZP 100 to irradiate a sample 106 with only light condensed while avoiding an influence of direct light. An incident X-ray beam 104 is made to get incident into the FZP 100, and a Bessel beam 107 formed in a transmission beam is emitted onto a measuring objective area of the sample 106. The unnecessary diffraction X-ray included in the diffraction X-ray beam is removed by a pinhole 109, and only diffraction light 108 from the irradiation area of the Bessel beam on the sample 106 is made to get incident into a detector 110, so as to measure intensity thereof.;COPYRIGHT: (C)2005,JPO&NCIPI