METHOD FOR MANUFACTURING FINE PROJECTION ARRAY, FINE PROJECTION ARRAY, FINE RECESSED SURFACE ARRAY, AND METHOD FOR MANUFACTURING FINE RECESSED SURFACE ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a master and mold for inexpensively manufacturing a large-area or long-sized microlens array and a method for manufacturing the same.;SOLUTION: The method for manufacturing the fine projection arrays comprising a step of preparing a substrate having electric conductivity on its surface, a step of forming an insulating layer on the surface of the substrate, a step of forming a plurality of openings on the substrate, a step of forming a first plating layer by a first plating solution having an isotropic growth property on the substrate formed with the openings, and a step of forming a second plating layer on the first plating layer by a second plating solution having a smoothing effect on the substrate formed with the first plating layer, wherein the insulating layer is a photoresist and in the step of forming the openings among the aforesaid processes, the desired regions are exposed with one point or a plurality of points being irradiated with a light source, scanning the same on the substrate and moving the substrate, then subjecting the photoresist to development processing is employed as the main configuration.;COPYRIGHT: (C)2005,JPO&NCIPI