FINE MACHINING ELEMENT, ACTUATOR, LIQUID DROP DISCHARGE HEAD, LIQUID DROP DISCHARGE RECORDING DEVICE, ELECTROLUMINESCENCE DISPLAY PANEL MANUFACTURING DEVICE, MICROARRAY MANUFACTURING DEVICE, AND COLOR FILTER MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide fine machining elements including an actuator and a liquid drop discharge head of high hydrophobic effect manufactured by applying hydrophobic treatment by obtaining a method for stably and efficiently applying hydrophobic treatment to the surface of an operating part in a short time, and to provide a recording device for recording using the obtained liquid drop discharge head, and a device for manufacturing a microarray by discharging biomolecules or the like.;SOLUTION: A hydrophobic insulating film 14 having a straight chain alkyl group is formed on the surface of a vibrating plate 4 which is the operating part (a driven part) displaced when force such as electrostatic force is generated between the operating part and an electrode 8 which is a driving part.;COPYRIGHT: (C)2005,JPO&NCIPI