Inspection system and the reflection-type X-ray microscope for inspecting an object at a wavelength ≦ 100nm

摘要

In the reflection-type X-ray microscope for inspecting an object in the object plane, the object, the wavelength 100nm, in particular, it is illuminated by rays of 30nm, and is imaged by enlarging the image plane, the present invention includes a first mirror and a second mirror and, and a first sub-system arranged in the optical path to the image plane from the object plane. The present invention is characterized by including a second secondary system having a first mirror 3 at least reflective X-ray microscope is appended to the first sub system in the optical path.