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PLATING DEVICE, PLATING LIQUID EVALUATION DEVICE, METHOD OF OPERATING PLATING LIQUID, AND EVALUATION METHOD FOR PLATING LIQUID
PLATING DEVICE, PLATING LIQUID EVALUATION DEVICE, METHOD OF OPERATING PLATING LIQUID, AND EVALUATION METHOD FOR PLATING LIQUID
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机译:放置设备,放置液体评估设备,操作放置液体的方法以及放置液体的评估方法
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摘要
PROBLEM TO BE SOLVED: To provide a plating device capable of evaluating the deteriorated condition of a plating liquid at high precision before a gold colloid caused by disproportionation reaction is produced in the liquid.;SOLUTION: The plating device is provided with: a plating treatment tank 1 to be charged with a plating liquid comprising a gold sulfite complex; a plating liquid replacement means for replacing the plating treatment tank 1 with a plating liquid; and a plating liquid analysis means 5 for sampling the plating liquid from the plating treatment tank 1 or the plating liquid replacing means and analyzing the same. The plating liquid analysis means 5 is provided with: an ultraviolet light source; a cell for securing the ultraviolet light path of the plating liquid; a measurement means for measuring the absorbing properties of ultraviolet rays including a wavelength of 220 to 240 nm; and an evaluation means for evaluating the deteriorated condition of the plating liquid from the measured absorbing properties in a wavelength of 220 to 240 nm.;COPYRIGHT: (C)2005,JPO&NCIPI
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