A method of manufacturing the MEMS comb actuator, which is embodied in the insulating material

摘要

I to provide a method for producing the MEMS comb actuator, which is embodied in the [challenge] insulating material. A stationary comb fixed SOLUTION: A substrate, a movable comb which is separated from the substrate, a post fixed to the substrate, and movably the movable comb is coupled to the post while being separated from the substrate MEMS comb actuator having a, a spring support. The fixed comb spring, movable comb, and posts are constructed in an insulating material layer formed on the substrate, the conductive metal coating film is formed on each surface of the movable comb and the fixed comb. Then, the method comprising a substrate, forming an insulating material layer with a predetermined thickness made of a polymer or silica on the substrate, the fixed comb in the insulating material layer, the movable comb and selectively etching the substrate and the insulating material layer The manufacturing method of the MEMS comb actuator with a, a step of forming the spring post and to form the conductive metal coating film on the surface of each movable comb and the fixed comb. According to this configuration, it can be formed integrally on a single substrate with an optical element formed on an insulating material such as a polymer or silica MEMS comb actuator.