MEMS comb actuator materialized on insulating material and method of manufacturing thereof

摘要

A microelectromechanical system (MEMS) comb actuator materialized in an insulating material and a manufacturing method thereof are provided. The MEMS comb actuator includes a stationary comb fixed to a substrate; a movable comb separated from the substrate; a post fixed to the substrate; and a spring connected to the post to be separated from the substrate so as to movably support the movable comb. The stationary comb, the movable comb, the post, and the spring are formed in an insulating material layer formed on the substrate, and a metal coating layer is formed at least on the surface of the stationary comb and the movable comb. The method includes preparing a substrate; forming an insulating material layer on the substrate using silica or polymer; and selectively etching the insulating material layer and the substrate, thereby forming a stationary comb, a movable comb, a post, and a spring in the insulating material layer, and forming a metal coating layer on the surfaces of the stationary comb and the movable comb.