And cleaning compositions alkanolamine-based release - sulfoxide - pyrrolidone (pyrrolidinone)

摘要

The present invention, in particular, it is to be understood relates to a composition for stripping photoresist from a substrate, alkyl-substituted pyrrolidone about 50 wt% to about 5% by weight of said composition, and mixtures thereof or alkyl substituted piperidone I include the alkanolamines one or more of about 20% to about 0.2%, sulfoxide 94% to about 50%, and mixtures thereof Suruhokison. It is advantageous, when soaked for 30 minutes in the composition which was maintained at 70 ℃, the copper substrate was rotated at a rate of about 200 per minute with respect to the composition, wherein the composition is a copper substrate speed to remove the copper from can be a less than about 10 angstroms per minute.