Verification manner of the mask drawing data, the verification device of the mask drawing data and computer reading possible record media null which stores the verification program of the mask drawing data

摘要

PROBLEM TO BE SOLVED: To shorten a verifying process time and to eliminate the need for a large-capacity storage file for working in a CAD tool which verifies corrected pattern data. ;SOLUTION: A data conversion part 14 converts pattern data into mask forming data, a unit area extraction part 15 extracts a unit area including a corrected pattern from the mask forming data before and after the conversion, and a logical difference arithmetic part 16 converts only the mask forming data in the extracted unit area into graphic data to perform a logical difference arithmetic process.;COPYRIGHT: (C)1998,JPO