METHOD AND DEVICE FOR VERIFYING MASK FORMING DATA, AND COMPUTER-READABLE RECORDING MEDIUM STORED WITH PROGRAM FOR VERIFYING MASK FORMING DATA

摘要

PROBLEM TO BE SOLVED: To shorten a verifying process time and to eliminate the need for a large-capacity storage file for working in a CAD tool which verifies corrected pattern data. ;SOLUTION: A data conversion part 14 converts pattern data into mask forming data, a unit area extraction part 15 extracts a unit area including a corrected pattern from the mask forming data before and after the conversion, and a logical difference arithmetic part 16 converts only the mask forming data in the extracted unit area into graphic data to perform a logical difference arithmetic process.;COPYRIGHT: (C)1998,JPO