Movement control strategy and trajectory planning of two-dimensional three-degree-of-freedom robot arm

摘要

A method of moving the substrate to a predetermined position with the designated position by the robot manipulator, the robot manipulator comprises a coupling portion a plurality of actuators, and an end effector for holding a substrate, the end effector for robotic manipulator other It is rotatable independently Te. Determining a step of selecting a reference point of the end effector for determining the position of the end effector, a moving path to move toward a predetermined position along with the specified position the end effector of the robot arm, the method consists of , rotary element is included in the movement of the end effector of a robot manipulator along the moving pathway. Reference point is offset from the list of the robot manipulator. The movement profile, is converted at the junction profiles moving in the joints of the robot manipulator actuator, movement of the end effector in a predetermined position with the designated position is executed.