The pressure sensor which has micro mechanical constitution element and this kind of constitution element

摘要

Micro mechanical constitution element (10) being, constitution element (10) the distortion of cross direction, parallel constitution element (10) the distortion, concentrates on the specified territory of the constitution element structure namely, vis-a-vis both main surface, it seems that can separate from the stress of the cross direction because of this, constitution element (10) in and the stress of vertical direction, micro mechanical constitution element (10) is proposed. According to this invention, the constitution element structure, the structure of one bellows condition (11) having had at least because of this, the structure of this bellows condition (11), constitution element (10) the distortion of cross direction concentrates.Furthermore, the pressure sensor which has this kind of micro mechanical constitution element in order to detect measurable quantity is proposed.