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Thermoelectric cooling temperature controller for semiconductor manufacturing process equipment
Thermoelectric cooling temperature controller for semiconductor manufacturing process equipment
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机译:半导体制造工艺设备的热电冷却温度控制器
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摘要
A thermoelectric-cooling temperature control apparatus for a semiconductor device fabrication facility maintains a temperature condition, such as the temperature of a wafer, stable during the fabrication process. The apparatus includes a heat exchanger having a thermoelectric cooling element which produces a Peltier Effect to cause the element to absorb and radiate heat according to current flowing through the element
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