Being forecasting manner of time-dependant insulating breaking property and forecasting

摘要

PROBLEM TO BE SOLVED: To provide a method and a device for efficiently predicting dielectric breakdown over aging (TDDB) over a wide region with fewer number of insulating film samples. ;SOLUTION: In this predictive method, in a process 11, plural insulating film samples having a fixed thickness and a fixed area are prepared, and dielectric breakdown voltages thereof are measured. In a process 12, the film thinning quantities of respective insulating films are calculated from data provided in the process 11. In a process 13, the data provided in the process 11 are sorted, and a dielectric breakdown voltage distribution is determined. In a process 14, the defect distribution (number of defects per unit area) of insulating films is found from data provided in the process 13. In a process 15, the defect distribution provided in the process 14 is determined as a function of film thinning quantities of insulating films provided in the process 12. In a process 16, while using the defect distribution which is determined as a function of film thinning quantities in the process 15, TDDB at an arbitrary voltage and an arbitrary temperature are predicted concerning the insulating film of an arbitrary area. These series of measurement and processing are simpler and more efficient than the actual conventional measurement of TDDB.;COPYRIGHT: (C)2000,JPO