Reflected type illumination optical element, reflected type illumination optical system, and DUV - EUV optical exposure device

摘要

Reflected type optical element 21, has had opening A of the same form and opening B at two same sizes, the form where opening cuts off the portion of the cycle is done. Namely, the ring, in distance, it is the kind of form which is cut off in 2 these straight lines which balance to the straight line which passes by the center of that ring are, and so on. And, two opening between of 22 and opening 23, being connected with the tubular component, has done the form of tube type as a whole, each step surface of the tubular component, opening 22, has done the same form as opening 23. And, the inside of the tubular component, has become the kind of reflecting interface which is shown afterwards. When from opening A side, it projects the light from of the illuminant P inside reflected type optical element 21 and sees from opening 23, other than the illuminant P, the many false illuminant is visible, as an integrator works.