Being the manner which produces the production manner of connection uniting the alumimium nitride quality ceramic backing material and connection union of the alumimium nitride quality ceramic

摘要

PROBLEM TO BE SOLVED: To provide an unknown method that can joint the base materials made of aluminum nitride ceramic to each other substantially via no third phase other than aluminum nitride ceramic, when the same base materials of aluminum nitride ceramic are jointed. ;SOLUTION: An adhesive layer containing at least aluminum nitride ceramic and a fusion mixture is formed between the base materials 1 and 2 and they are heat-treated to effect eutectic fusion. Then, the recrystallization phase of aluminum nitride ceramic is precipitated between the joint interface of the base materials 1 and 2. The adhesive is heated in the temperature range T1 over the melting point of the fusing mixture, then heated in the temperature range from T1 to T2 higher than T1 until the components of the fusing mixture are excluded from the interface then the recrystallization phase is precipitated.;COPYRIGHT: (C)1998,JPO