Electrochemical Synthesis of Ceramic Materials. 4. Electrophoretic Deposition ofMetal-Nitride Ceramic Precursors

摘要

We have prepared metal-nitride, ceramic precursors by anodic dissolution of thecorresponding metal in liquid NH3 electrolyte solutions, and then deposited coatings of these precursors onto n-Si substrates by electrophoresis. X-ray diffraction and electron microscopy indicate that calcination of the precursor-coated substrates yields coatings of AlN, delta-NbN, and Ni3N. Precursor coatings are formed by applying fields greater than 10 V/cm between electrodes in a CH3CN suspension of the precursor. The positively charged precursor particles deposit selectively on the cathode. Subsequent calcination in flowing NH3 or Ar yields the metal-nitride coating. The Ni3N coating was prepared by calcining the precursor at 375 C in NH3, while the AlN and NbN precursor coatings were prepared by calcination at 1100 C in NH3 and 800 C in Ar, respectively.