Point diffraction interferometer measuring device and point diffraction interferometer measurement method

摘要

After forming the spherical wave almost ideal by using a point light source generator 101 and 102, were through the test object 109 the light beam consisting of the spherical wave, point diffraction interferometer measurement method, the optical path splitting a light beam The split into two light beams by 105 elements, is converted to a reference beam is a spherical wave almost ideally passed through a pin hole 129, the luminous flux of one of the light beams split and the other of the light beam which has the divided I to detect interference fringes generated by interference between the measurement light and reference light is light flux. It is possible without being affected by disturbance due to vibration of the system, by observing the interference fringes, and measuring the wavefront aberration of the test object.