Equipment and gas replacement method, mask protection device, mask, exposure method and apparatus

摘要

Providing a gas replacement device can be replaced efficiently and stably in the gas space is formed between the protective member which is mounted through the frame member and mask. It is to be understood to replace the specific gas to the first space inside is formed between the mask and the pellicle, the pellicle frame, gas replacement device can supply replacement chamber for the specific gas to the gas exchange chamber I have a gas replacement mechanism. The pellicle frame has a first opening communicating with the outside first space inside the pellicle frame, a space formed for forming a second space on opposite sides of the pellicle to the first space member is connected. By displacement chamber gas replacement mechanism for supplying the specific gas to the gas exchange chamber, a specific gas is supplied to the first space through the first opening.