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Microring and microdisk resonators for lasers fabricated on silicon wafers

机译:用于硅晶片上制造的激光器的微环和微盘谐振器

摘要

Briefly, in accordance with one embodiment of the invention, a light emitting device may comprise a microresonator having an annular structure such as a ring or a disk to recirculate light at a desired wavelength formed on a silicon substrate. A waveguide may be disposed on the silicon substrate to couple with the microresonator. The microresonator may be formed with silicon or silicon-germanium nanocrystals in silicon dioxide and rare earths such as erbium or ytterbium. The light emitting device may be monolithically fabricated using a standard silicon process.
机译:简而言之,根据本发明的一个实施例,一种发光器件可以包括具有环形结构的微谐振器,该环形结构例如是环或盘,以使形成在硅衬底上的期望波长的光再循环。波导可以设置在硅基板上以与微谐振器耦合。微谐振器可以由二氧化硅中的硅或硅锗纳米晶体和诸如as或的稀土形成。可以使用标准硅工艺来整体制造发光器件。

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