Ethylene oxide decomposition processing method and decomposition processing device therefor
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机译:环氧乙烷分解处理方法及其分解处理装置
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摘要
A decomposition processing method for ethylene oxide is provided for when concentration of the ethylene oxide to be decomposed in a gas varies. The method comprises steps of reducing the concentration of ethylene oxide in the gas to a predetermined concentration which is less than the highest concentration of the ethylene oxide in the range of the variation, adsorbing ethylene oxide to a photocatalyst which has ethylene oxide adsorbing ability, and decomposing ethylene oxide by action of one of the photocatalyst and a combination of the photocatalyst and plasma. The adsorbing step and decomposing step are conducted after the reducing step.
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