Electroosmotic micropump with planar features

摘要

An electroosmotic micropump having a plurality of planar features formed in a substrate to form an electroosmotic flow (EOF) pumping region. Inlet and outlet manifolds on either side of the pumping region to enable fluid to be pumped into and through the micropump. A cover is bonded to the substrate to seal the pumping region and manifolds. An insulating layer coating is applied to the formed substrate to reduce current flow when an electric filed is applied during pumping operation. An additional layer is applied on top of the insulating layer to provide electrochemistry at the liquid-solid interface in the electroosmotic micropump that enhances micropump performance.