Method for producing the rotor of a drag vacuum pump and a rotor produced according to this method

摘要

A one-piece rotor (1) for a drag vacuum pump (21) is designed, at least in sections, as a turbomolecular vacuum pump with rotor blades (5) and stator blades (9), The rotor (1) has a hub (2) whose peripheral surface supports the pump structures. The rotor-side pump structures include, at least in sections, blades (5), which are arranged in rows (4) and which are formed from the surface of a blank by means of metal cutting operations. The metal cutting operations include producing radial peripheral grooves (3) into which stator blade rows (9) engage when the pump is assembled. In order to simplify the machining of the rotor (1), another metal cutting operation provides the outer surface of the blank with one or more thread grooves (13).