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Dry etching method, microfabrication process and dry etching mask
Dry etching method, microfabrication process and dry etching mask
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机译:干蚀刻方法,微细加工工艺及干蚀刻掩模
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摘要
A dry etching is performed using a mask made of a tantalum or a tantalum nitride under a reaction gas of a carbon monoxide with an additive of a nitrogen containing compound gas.
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