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Apparatus and method for mass flow controller with a plurality of closed loop control code sets
Apparatus and method for mass flow controller with a plurality of closed loop control code sets
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机译:具有多个闭环控制代码集的质量流量控制器的设备和方法
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摘要
A mass flow controller includes an electronic controller for which a plurality of closed loop control codes sets may be uploaded. In a dual processor embodiment, one processor may upload a plurality of codes sets for another, with the selection of codes sets determined by the uploading processor either autonomously or through user interaction.
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