首页>
外国专利>
Process of direct growth of carbon nanotubes on a substrate at low temperature
Process of direct growth of carbon nanotubes on a substrate at low temperature
展开▼
机译:低温在衬底上直接生长碳纳米管的过程
展开▼
页面导航
摘要
著录项
相似文献
摘要
Carbon nanotubes are directly grown on a substrate surface having three metal layers thereon by a thermal chemical vapor deposition at low-temperature, which can be used as an electron emission source for field emission displays. The three layers include a layer of an active metal catalyst sandwiched between a thick metal support layer formed on the substrate and a bonding metal layer. The active metal catalyst is iron, cobalt, nickel or an alloy thereof; the metal support and the bonding metal independently are Au, Ag, Cu, Pd, Pt or an alloy thereof; and they can be formed by sputtering, chemical vapor deposition, physical vapor deposition, screen printing or electroplating.
展开▼