首页>
外国专利>
Abrasive pad and process for the wet-chemical grinding of a substrate surface
Abrasive pad and process for the wet-chemical grinding of a substrate surface
展开▼
机译:用于基材表面湿化学研磨的研磨垫和方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
An abrasive pad is suitable for the wet-chemical grinding of a substrate surface. The novel abrasive pad has a polymer matrix with a defined water-solubility. The water-solubility is realized by the level of nonpolar and polar repeat units in the polymers.
展开▼