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Interferometer using integrated imaging array and high-density polarizer array

机译:使用集成成像阵列和高密度偏振片阵列的干涉仪

摘要

An integrated imaging element for an interferometer generates at least one image that includes multiple interference portions with different relative phase shifts interleaved in a pattern having a high spatial frequency in the image. The interleaved pattern is at least partially determined by the pattern of a high density polarizing array used in the integrated imaging element. In various embodiments, the multiple interference portions are interleaved in a checkerboard pattern across the entire surface of a detector device. As a result, various non-common mode errors present in various interferometers that generate separate non-interleaved images for each relative phase are reduced or eliminated because multiple phase-shifted interference image information for a small region of an object is provided within a small region on the detector device.
机译:用于干涉仪的集成成像元件产生至少一个图像,该图像包括以图像中具有高空间频率的图案交错的具有相对相对相移的多个干涉部分。交错的图案至少部分地由集成成像元件中使用的高密度偏振阵列的图案确定。在各种实施例中,多个干涉部分在检测器装置的整个表面上以棋盘图案交错。结果,由于在较小区域内提供了针对物体的较小区域的多个相移干涉图像信息,因此减少或消除了在针对每个相对相位生成单独的非交错图像的各种干涉仪中存在的各种非共模误差。在检测器设备上。

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