Load sensor, temperature compensation method for the load sensor and manufacturing method of the load sensor

摘要

A load sensor comprises a load detecting element and a temperature compensating element. The load detecting element is made of the material and acting the load thereon. The temperature compensating element is made of the same material with the load detecting element, and made as the same dimension or similar figure with the load detecting element. The load detecting element and the temperature compensating element are arranged closely each other. Further, each of the load detecting element and the temperature compensating element comprises conductive part which is made of the same composite. The conductive parts of the load detecting element and the temperature compensating element are electrically connected to a power source in parallel each other. Difference between voltages which act on the conductive parts of the load detecting element and the temperature compensating element is detected as a equivalent of the load.