process for making a device to microcavita of fabry - perot technology integrated in silicon.

• 1. 集成在织物中的柔性电加热器和用于制造集成在织物中的柔性电加热器的方法 [P] . 中国专利： CN111919508A . 2020-11-10
• 2. 用于集成器件的衬底级组件、其制造工艺及相关集成器件 [P] . 中国专利： CN101331080B . 2012.12.26
• 3. process for making structures microcavita of fabry - perot integrated in silicon technology can be used for the development of sensors and / or photon devices [P] . ITTO20050455A1 . 2006-12-30

  机译： 用于制造结构微腔结构的工艺-集成在硅技术中的珀罗可用于传感器和/或光子设备的开发

• 4. METHOD FOR PRODUCING AN INTEGRATED FABRY-PEROT MICROCAVITY DEVICE WITH SILICON TECHNOLOGY [P] . 世界知识产权组织专利： WO2005064394A1 . 2005-07-14

  机译： 利用硅技术生产集成式微动-珀罗微腔装置的方法

• 5. PROCESS AND DEVICE FOR FABRY-PEROT SPECTROSCOPY [P] . 欧洲知识产权局专利： EP0494883B1 . 1994-07-13

  机译： 法布里-珀罗光谱的方法和装置

• 1. Analysis of key technologies and development of integrated digital processing system for cast blasting design [J] . 丁小华, 李克民, 肖双双, 中南大学学报（英文版） . 2015,第003期
• 2. Integrated UV-based photo microreactor-distillation technology toward process intensification of continuous ultra-high-purity electronic-grade silicon tetrachloride manufacture [J] . Ye Wan, Yu Zhao, Xin Chang, 中国化学工程学报（英文版） . 2020,第009期
• 3. Integrated Fabry-Perot microcavity based on surface micromachining processes [C] . Raluca Mueller, D.Syvridis, M. Kusko, Conference on advanced topics in optoelectronics, microelectronics, and nanotechnologies . 2003
• 4. Polycrystalline diamond thin-film Fabry-Perot optical resonators on silicon. [D] . Booth, Roger Allen, Jr. 2003
• 5. Fiber Optic Fabry-Perot Current Sensor Integrated with Magnetic Fluid Using a Fiber Bragg Grating Demodulation [O] . Ji Xia, Qi Wang, Xu Liu, 2015
• 6. Wearable Devices for Remote Physical Rehabilitation Using a Fabry-Perot Optical Fiber Sensor: Ankle Joint Kinematic [O] . Maria de Fatima Domingues, Vasco Rosa, Ana Catarina Nepomuceno, 2020
• 7. Advanced Processing and Characterization Technologies. Fabrication andCharacterization of Semiconductor Optoelectronic Devices and Integrated Circuits Held in Clearwater, Florida on 8-10 May 1991. American Vacuum Society Series 10 [R] . Holloway, P. H. 1992

• 1. Creating Distinctive Connections between Multifunctional Microwave Circuits and Mobile-Terminal Radio-Frequency Integrated Chips Using Integrated Passive Device Technology [J] . Yongle Wu ,Mengdan Kong ,Zheng Zhuang . 中国通信 . 2021,第008期
• 2. Analysis of key technologies and development of integrated digital processing system for cast blasting design [J] . 丁小华 ,李克民 ,肖双双 . 中南大学学报 . 2015,第003期
• 3. Analyzing the Integrated Teaching of Theory and Practice in Communication Technology Based on the Cognitive Process [J] . Xiaobiao Wu ,Hui Shi ,Ying Zhang . 当代教育研究(百图) . 2021,第012期
• 4. 高能束焊接技术在电真空器件制造工艺中的应用与发展 [C] . 赵世柯 ,邓峰 ,王国建 . 第十四次全国焊接学术会议 . 2009
• 5. 直接的浅沟槽隔离器件CMP技术在集成电路高压器件芯片制造中的应用及性能研究 [A] . 田明 . 2005