A planar micro parallel-link mechanism that provides fine planar motion to a platform (14) in two translation directions and one rotation direction using comb-drive actuators (18) with gear chain (16) systems coupled to rack-and-pinions (36) and struts (46). The micro parallel-link mechanism has a large operating envelope and can be fabricated using surface micromachining techniques. The kinematic and dynamic analyses of the micro parallel-link mechanism are integrated with closed-loop control system to monitor and supervise the position and velocity of the micro mechanism with three degree-of freedom motions. Methods of depositing and building miniaturized tools and parts on the platform are also disclosed to provide the basic building block for a number of products applicable for nano technology, sensor, actuators, and biotechnology applications.
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