ULTRA THIN LAYER COATING USING SELF-ASSEMBLED MOLECULES AS A SEPARATING LAYER FOR DIFFRACTION GRATING APPLICATION

摘要

A method of forming a replica of a diffraction grating from a master grating is disclosed, wherein the method includes the steps of: depositing a release layer including a self-assembled monolayer (SAM) on an upper surface of the master diffraction grating (40); depositing a reflective layer (e.g., aluminum) over the release layer (50); providing an adhesive layer (e.g., epoxy) and a glass substrate over the reflective layer (60, 70); curing the adhesive layer (80); and separating the substrate, adhesive layer and reflective layer from the master grating (90), thereby producing a replica of the diffraction grating. The SAM release layer may be durable and a plurality of diffraction grating replicas may be produced from a master grating.