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DETECTOR ARRANGEMENT, METHOD FOR THE DETECTION OF ELECTRICAL CHARGE CARRIERS AND USE OF AN ONO FIELD EFFECT TRANSISTOR OF R DETECTION OF AN ELECTRICAL CHARGE
DETECTOR ARRANGEMENT, METHOD FOR THE DETECTION OF ELECTRICAL CHARGE CARRIERS AND USE OF AN ONO FIELD EFFECT TRANSISTOR OF R DETECTION OF AN ELECTRICAL CHARGE
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机译:检测器布置,检测电荷载体的方法以及R检测的电场效应晶体管的使用
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摘要
The invention relates to a detector arrangement (100), a method for the detection of electrical charge carriers and use of an ONO field effect transistor for detection of an electrical charge. The detector arrangement (100) has an ONO field effect transistor embodied on and/or in a substrate (101), for the detection of electrical charge carriers, such that the electrical charge carrier (103) for detection may be introduced into die ONO field effect transistor layer sequence (102), a recording unit (104), coupled to the ONO field effect transistor, for recording an electrical signal characteristic of the amount and/or the charge carrier type for the electrical charge carrier (103) introduced into the ONO layer sequence (102) and an analytical unit for determining the amount and/or the charge carrier type of the electrical charge carrier (103) introduced into the ONO layer sequence (102) from the characteristic electrical signal.
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