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Fowler-Nordheim (F-N) tunneling for pre-programming in a floating gate memory device

机译:Fowler-Nordheim(F-N)隧道技术,可在浮栅存储器件中进行预编程

摘要

A new flash memory cell structure comprising a floating gate memory cell is made in a semiconductor substrate (10) having a first conductivity type, such as p-type. A first well (11) within the substrate by having a second conductivity type different from the first conductivity is included. A second well (12) within the first well is also included having the first conductivity type. A drain (14) and a source (13) are formed in the second well having the second conductivity type, and spaced away from one another to define a channel area between the drain (14) and the source (13). A floating gate (15) and a control gate (17) structure is included over the channel area. The floating gate memory cell is coupled with circuits that induce F-N tunnelling of electrons out of the floating gate (15) into the channel area of the substrate (10) for erasing by applying a positive voltage to the second well (12), such as a voltage higher then the supply voltage, applying a positive voltage to the first well (11), which is substantially equal to the positive voltage of the second well (12), applying a negative voltage to the control gate (17) of the cell, while the substrate (10) is grounded.
机译:在具有第一导电类型(例如,p型)的半导体衬底(10)中制成包括浮栅存储单元的新的闪存单元结构。包括通过具有不同于第一导电性的第二导电类型的衬底内的第一阱(11)。还包括具有第一导电类型的第一阱内的第二阱(12)。漏极(14)和源极(13)形成在具有第二导电类型的第二阱中,并且彼此间隔开以在漏极(14)和源极(13)之间限定沟道区域。在沟道区域上方包括浮置栅极(15)和控制栅极(17)结构。浮栅存储单元与电路耦合,该电路通过将正电压施加到第二阱(12)上来引起电子从浮栅(15)的FN隧穿到衬底(10)的沟道区域中以进行擦除。一个高于电源电压的电压,向第一阱(11)施加正电压,该电压基本上等于第二阱(12)的正电压,向单元的控制栅极(17)施加负电压,同时将基板(10)接地。

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