Electron beam recorder, electron beam irradiation position detecting method and electron beam irradiation position controlling method

摘要

An electron beam recorder includes an electron optical system (102) for irradiating the electron beam (114) on a master (109) of an information recording medium and a shielding plate (107) for shielding the electron beam (114). An electron beam irradiation quantity detector (120) is provided on the shielding plate (107) and is divided into first and second electron beam detecting portions (120a, 120b) along an information recording direction (Y) on the master (109). A difference detector (125) calculates a difference (a-b) between a first quantity (a) of the electron beam (114) irradiated on the first electron beam detecting portion (120a) and a second quantity (b) of the electron beam (114) irradiated on the second electron beam detecting portion (120b) such that a position of the electron beam (114) in a direction (X) substantially perpendicular to the information recording direction (Y) is detected from the difference (a-b).