首页>
外国专利>
STABILIZATION METHOD OF SUBSTITUTED CYCLOTETRASILOXANE TO POLYMERIZATION BY USING FREE RADICAL SCAVENGER POLYMERIZATION INHIBITOR, TO INHIBIT POLYMERIZATION
STABILIZATION METHOD OF SUBSTITUTED CYCLOTETRASILOXANE TO POLYMERIZATION BY USING FREE RADICAL SCAVENGER POLYMERIZATION INHIBITOR, TO INHIBIT POLYMERIZATION
展开▼
机译:自由基清除剂聚合抑制剂的取代环四硅氧烷稳定化反应的方法来抑制聚合反应
展开▼
页面导航
摘要
著录项
相似文献
摘要
The present invention is; (a) a process for stabilizing a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, against polymerization used in a chemical vapor deposition process for silicon oxides in electronic material fabrication comprising providing an effective amount of a free radical scavenger polymerization inhibitor to such cyclotetrasiloxane; and (b) a composition of a cyclotetrasiloxane, such as 1,3,5,7-tetramethylcyclotetrasiloxane, stabilized against polymerization used in a chemical vapor deposition process as a precursor for silicon oxides in electronic material fabrication, comprising; such cyclotetrasiloxane and a free radical scavenger polymerization inhibitor.
展开▼