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BAFFLE HAVING PLURAL SLITS FOR OPTIMIZING FLOW OF SOURCE GASES BY FORMING PLURAL SLITS PENETRATING BODY OF BAFFLE
BAFFLE HAVING PLURAL SLITS FOR OPTIMIZING FLOW OF SOURCE GASES BY FORMING PLURAL SLITS PENETRATING BODY OF BAFFLE
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机译:具有形成多孔渗漏阀体的多孔衬管的多孔渗漏管以优化气源流动
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摘要
PURPOSE: A baffle having plural slits for optimizing flow of source gases is provided to optimize flow of source gases by forming a plurality of slits penetrating a body of a baffle. CONSTITUTION: A baffle is coupled to a focus ring for grasping a substrate and is used for controlling a flow rate of source gas. A body part(420) includes a plurality of slits(430) and a substrate entrance hole(440). A protrusion part(470) includes a plurality of slits and is coupled vertically to the body part. The body part further includes a hole corresponding to the substrate entrance hole.
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