FERROELECTRIC CAPACITOR CAPABLE OF PREVENTING REDUCTION OF EFFECTIVE CAPACITANCE DUE TO PLASMA DAMAGE BY FORMING SPACER ON SIDEWALL OF UPPER ELECTRODE OF FERROELECTRIC CAPACITOR AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A ferroelectric capacitor capable of preventing reduction of effective capacitance due to plasma damage and a fabricating method thereof are provided to maintain and manage stably the capacitance necessary for writing and reading data by preventing the loss of the ferroelectric capacitor. CONSTITUTION: A ferroelectric layer(35) is formed on a lower electrode(33). An upper electrode(36A) is formed on the ferroelectric layer. A spacer is formed to cover a part of a sidewall of the upper electrode and an overlapped part between an edge of the upper electrode and the ferroelectric layer. The spacer includes a first spacer(38A) for covering a part of the sidewall of the upper electrode and a second spacer(38B) formed between the first spacer and the ferroelectric layer.