WAFER HOLDER OF SEMICONDUCTOR FABRICATING EQUIPMENT TO PREVENT WAFER HELD BY WAFER HOLDER FROM BEING BROKEN

摘要

Purpose: by a wafer holder, a wafer holder of the semiconductor of manufacturing equipment is arranged to that chip holding is prevented to be damaged by equably distributing the pressure applied to chip. Construction: when a process is performed, one division disc spins. Multiple process chambers are configured with the aspect to center, and the side of index dial is mounted on. One wafer holder (20) holds a chip, the one-to-one correspondence with a large amount of process chambers and the surface for being mounted on index dial. One heater table selectively contacts the another side that index dial is mounted on to heat chip with wafer holder has the one-to-one correspondence for using wafer holder. Wafer holder includes a shell (21), a substrate (29), a spring unit and a chip fixing roller (30). One insertion hole of one predetermined size is formed in the center of shell to loading and unloading wafer. Chip is placed on the substrate for being coupled to one side of shell. Spring unit interconnects substrate and shell, so that substrate is to be elastically coupled to shell. Chip fixing roller selectively repairs the chip being placed on substrate, is mounted on substrate.