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LIGHT EMITTING DIODE HAVING VERTICAL ELECTRODE STRUCTURE, METHOD FOR MANUFACTURING THE SAME AND ETCHING METHOD FOR SAPPHIRE SUBSTRATE TO INCREASE CHIP PRODUCTION PER WAFER
LIGHT EMITTING DIODE HAVING VERTICAL ELECTRODE STRUCTURE, METHOD FOR MANUFACTURING THE SAME AND ETCHING METHOD FOR SAPPHIRE SUBSTRATE TO INCREASE CHIP PRODUCTION PER WAFER
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机译:具有垂直电极结构的发光二极管,制造方法相同的方法和蓝宝石基质的蚀刻方法以增加晶片的芯片产量
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摘要
PURPOSE: A light emitting diode having a vertical electrode structure, a manufacturing method for the same are provided for simplifying a manufacturing process. CONSTITUTION: A basic substrate(17) is provided with a via. A first conductive contact layer(15) is formed on the basic substrate. A first conductive clad layer(143) is formed on the first conductive contact layer. A light emitting layer(142) is formed on the first conductive clad layer. A second conductive clad layer(141) is formed on the light emitting layer. A second conductive contact layer(13) is formed on the second conductive clad layer. A first electrode(12) is formed on the second conductive contact layer. A second electrode(19) is connected with the first conductive contact layer through the via.
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