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PATTERN FORMING METHOD, WIRE PATTERN FORMING METHOD, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS FOR REDUCING FABRICATION COST BY USING PHOTOTHERMAL CONVERSION MATERIAL
PATTERN FORMING METHOD, WIRE PATTERN FORMING METHOD, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS FOR REDUCING FABRICATION COST BY USING PHOTOTHERMAL CONVERSION MATERIAL
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机译:利用光热转换材料降低制造成本的图案形成方法,线图案形成方法,光电器件和电子设备
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摘要
PURPOSE: A pattern forming method, a wire pattern forming method, an electro-optical device, and an electronic apparatus are provided to reduce the fabrication cost by using a photothermal conversion material for converting optical energy into thermal energy. CONSTITUTION: A thin film(2) is formed on a base member including a photothermal conversion material(1) that converts optical energy into thermal energy. A patterning process is performed to remove the thin film on the base member corresponding to a light-radiated region in order to pattern the thin film by radiating the light on the light-radiated region. The thin film is formed with an organic film or a monomolecular film.
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