首页> 外国专利> PATTERN FORMING METHOD, WIRE PATTERN FORMING METHOD, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS FOR REDUCING FABRICATION COST BY USING PHOTOTHERMAL CONVERSION MATERIAL

PATTERN FORMING METHOD, WIRE PATTERN FORMING METHOD, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS FOR REDUCING FABRICATION COST BY USING PHOTOTHERMAL CONVERSION MATERIAL

机译:利用光热转换材料降低制造成本的图案形成方法,线图案形成方法,光电器件和电子设备

摘要

PURPOSE: A pattern forming method, a wire pattern forming method, an electro-optical device, and an electronic apparatus are provided to reduce the fabrication cost by using a photothermal conversion material for converting optical energy into thermal energy. CONSTITUTION: A thin film(2) is formed on a base member including a photothermal conversion material(1) that converts optical energy into thermal energy. A patterning process is performed to remove the thin film on the base member corresponding to a light-radiated region in order to pattern the thin film by radiating the light on the light-radiated region. The thin film is formed with an organic film or a monomolecular film.
机译:目的:提供一种图案形成方法,布线图案形成方法,电光装置和电子设备,以通过使用用于将光能转换成热能的光热转换材料来降低制造成本。构成:在包括光热转换材料(1)的基础构件上形成薄膜(2),该材料将光能转换为热能。进行构图工艺以去除基底构件上与光辐射区域相对应的薄膜,以便通过在光辐射区域上辐射光来对薄膜进行构图。薄膜由有机膜或单分子膜形成。

著录项

  • 公开/公告号KR20050016135A

    专利类型

  • 公开/公告日2005-02-21

    原文格式PDF

  • 申请/专利权人 SEIKO EPSON CORPORATION;

    申请/专利号KR20040061366

  • 发明设计人 TOYODA NAOYUKI;

    申请日2004-08-04

  • 分类号H01L21/027;G03F7/36;

  • 国家 KR

  • 入库时间 2022-08-21 22:05:53

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