PORTABLE SPEED MEASUREMENT APPARATUS TO MEASURE IN PLACE RECIPROCATING WAFER TRANSFERRING MOTION

摘要

Purpose: a light velocity measuring device is arranged to measure the reciprocating motion of wafer transfer equipment regardless of when and where is in an ion implantation process etc.. Construction: a light velocity measuring device includes an importation, a control unit, a display part. Importation (100) output is used as a scheduled detecting signal, by amplifying and being formed analog signal, after the analog signal that the reciprocating motion read according to wafer transfer equipment generates. One control unit (200) receives detecting signal from importation, will test analog signal according to reciprocating motion and is converted into a digital signal, digital signal is by being a control signal according to each speed output of calculating is moved back and forth. One display part (300) passes through each speed of a number according to control signal representation, after receiving control signal from control unit.