WAFER AUTOMATIC TRANSFERRING APPARATUS AND A MEASUREMENT APPARATUS FOR MOCVD PROCESS, CAPABLE OF AUTOMATICALLY TRANSFERRING A WAFER BETWEEN A LOADER CASSETTE AND A SUSCEPTOR

摘要

PURPOSE: A wafer automatic transferring apparatus and a measurement apparatus for MOCVD process are provided to prevent the crack, scratch, and yield rate decrease of a wafer by transferring the wafer using a negative pressure pick-up pad which can pick up in non-contacting state with the suction caused by the negative force.;CONSTITUTION: A first transfer apparatus comprises a transfer arm which draws a wafer(W1) to be deposited and transfers it to a buffer stage(150). A second transfer apparatus picks up the wafer to be deposited in non-contacting state with the suction force caused by the negative pressure. After transferring to a susceptor(14) on the top of a main body(11) of a reactor(10) and depositing it, the deposited wafer is loaded on a buffer stage.;COPYRIGHT KIPO 2011