EXPOSURE APPARATUS TO EXTEND LIFETIME OF LIGHT SOURCE AND INCREASE OUTPUT

摘要

Purpose: an exposure device is arranged to extend the service life of a light source and increases output, is necessary light to an exposure process by a kind of generation of electrodeless plasma method. Construction: a chip is placed on a wafer chuck. One light source (20) generates scheduled light by a kind of electrodeless plasma method, is mounted on the top of wafer chuck. Light source includes an electrodeless pipe (21) made of a transparent material, wherein electrodeless pipe is filled with the filler of inert gas. Multiple ferrite cores (22) are installed in the both sides of electrodeless pipe. One coil (23) is wound on around the outer circumferential surface of ferrite core. RF (radio frequency) power is connected to coil.