EXHAUST PRESSURE CONTROLLING APPARATUS WITH PRESSURE SENSOR AND EXHAUST PRESSURE CONTROLLER CAPABLE OF KEEPING EXHAUST PRESSURE OF BAKE UNIT BLOCK CONSTANT IN WAFER BAKE EQUIPMENT AND METHOD THEREOF

摘要

Purpose: a discharge pressure controller of chip bakes equipment, and method is arranged to keep discharge pressure constant in a roasting unit block by using a pressure sensor and a discharge pressure controller. Construction: a discharge pressure controller includes the first exhaust line, the second exhaust line, an air door, a pressure sensor, a discharge pressure controller and a master controller. First exhaust line (120,130) is used for removing exhaust gas from each roasting unit of a roasting unit block. Second exhaust line (140) is connect with the first exhaust line makes exhaust gas flow to outside. Air door (150) for baking the control pressure of unit block is mounted on the second exhaust line. The pressure sensor (180) of measurement pressure for each the first exhaust line is connect with the first exhaust line. Discharge pressure controller (160,170) is used for the automatic pressure control of the first exhaust line. Master controller (190) can automatically control the pressure of roasting unit block according to the result of pressure sensor.