首页> 外国专利> METHOD FOR FABRICATING WAFER LEVEL CHIP SIZE PACKAGE AND MOLDING APPARATUS USED THEREIN TO PREVENT WAFER WARPAGE USING SIMULTANEOUS MOLDING METHOD

METHOD FOR FABRICATING WAFER LEVEL CHIP SIZE PACKAGE AND MOLDING APPARATUS USED THEREIN TO PREVENT WAFER WARPAGE USING SIMULTANEOUS MOLDING METHOD

机译:制造晶圆级芯片尺寸包装的方法及其中使用的成型设备,通过同时成型方法防止晶圆翘曲

摘要

PURPOSE: A method for fabricating a wafer level chip size package and a molding apparatus are provided to prevent a wafer warpage and a chip crack by molding simultaneously over the upper and lower surfaces of the wafer with the same kinds of sealing material. CONSTITUTION: A wafer including a plurality of semiconductor chips is arranged, on the wafer, conductive bumps are formed. The lower surface of the wafer and the top surface of the wafer on which the conductive bumps are formed are simultaneously molded with a sealing material. The top end of the conductive bumps is exposed by grinding the sealing material formed on the top surface of the wafer. Terminals are formed on the exposed conductive bumps. The wafer that the plurality of semiconductor chips are formed on the top surface thereof is diced one by one.
机译:目的:提供一种晶片级芯片尺寸封装的制造方法和一种模制设备,以通过使用相同类型的密封材料同时在晶片的上下表面上模制来防止晶片翘曲和芯片破裂。组成:包括多个半导体芯片的晶片,在晶片上形成导电凸点。晶片的下表面和其上形成有导电凸块的晶片的上表面同时用密封材料模制。通过研磨形成在晶片的顶表面上的密封材料来暴露导电凸块的顶端。在暴露的导电凸块上形成端子。在其顶面上形成有多个半导体芯片的晶片被一一划片。

著录项

  • 公开/公告号KR20050023536A

    专利类型

  • 公开/公告日2005-03-10

    原文格式PDF

  • 申请/专利权人 SAMSUNG ELECTRONICS CO. LTD.;

    申请/专利号KR20030059832

  • 发明设计人 YOON TAE SUNG;

    申请日2003-08-28

  • 分类号H01L21/56;

  • 国家 KR

  • 入库时间 2022-08-21 22:05:42

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