首页>
外国专利>
METHOD FOR FABRICATING WAFER LEVEL CHIP SIZE PACKAGE AND MOLDING APPARATUS USED THEREIN TO PREVENT WAFER WARPAGE USING SIMULTANEOUS MOLDING METHOD
METHOD FOR FABRICATING WAFER LEVEL CHIP SIZE PACKAGE AND MOLDING APPARATUS USED THEREIN TO PREVENT WAFER WARPAGE USING SIMULTANEOUS MOLDING METHOD
展开▼
机译:制造晶圆级芯片尺寸包装的方法及其中使用的成型设备,通过同时成型方法防止晶圆翘曲
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: A method for fabricating a wafer level chip size package and a molding apparatus are provided to prevent a wafer warpage and a chip crack by molding simultaneously over the upper and lower surfaces of the wafer with the same kinds of sealing material. CONSTITUTION: A wafer including a plurality of semiconductor chips is arranged, on the wafer, conductive bumps are formed. The lower surface of the wafer and the top surface of the wafer on which the conductive bumps are formed are simultaneously molded with a sealing material. The top end of the conductive bumps is exposed by grinding the sealing material formed on the top surface of the wafer. Terminals are formed on the exposed conductive bumps. The wafer that the plurality of semiconductor chips are formed on the top surface thereof is diced one by one.
展开▼