METHOD OF PRODUCING ELECTRONIC GRADE TETRAETHOXYSILANE FROM TETRACHLOROSILANE-TRIMETHYLCHLOROSILANE AZEOTROPE

摘要

The invention azeotrope generated in the process for producing a monosilane compound in, more particularly, metallic silicon and a catalytic reaction of chloromethane relates to a method of producing silane on electronic grade tetra from the azeotropic mixture of silicon tetrachloride and trimethylchlorosilane mixture as the difference between the process and having a boiling point in the process of conversion to example chloro silanes on silicon tetrachloride by addition of the azeotropic mixture of the silicon tetrachloride and trimethylchlorosilane separation is difficult with a typical distillation, the ethanol by adjusting the addition amount and addition rate the zoom switch with trimethylchlorosilane in the process of the removal to the silane-ethoxy-chloro silanes mixture trimethylchlorosilane compound by a simple process for the distillation separation of the recovered ethoxy chlorosilane stream, and the separation and recovery electrons from the ethoxy chloro silanes Related to the method for producing a silane in tetrahydro-class One will.; According to the present invention, by separating the trimethylchlorosilane in a simple way from the azeotropic mixture of metallic silicon and silicon tetrachloride as trimethylchlorosilane generated during production of monosilane compound in the catalytic reaction of chloromethane silane can be reused, and the ethoxy prepared from silicon tetrachloride the silane to the electronic grade tetra-chloro-silane can be prepared in good yield of 90% or more because there is an effect that it is possible to maximize the efficiency of use of monosilane compound obtained in the catalytic reaction of the metallic silicon and chloromethane.